Single Wafer Processing

for Dry Etch & Deposition Application

• With XRG-800 Standard Radical Generator
  • XPL - 300 (Only for IC wafers)

• With XRG-900 High Rate Radical Generator
  • XPL - 900 SLIM

Dry Etch Batch Processors

• With XRG-800 Standard Radical Generator
  • XCD - 70X

• With XRG-900 High Rate Radical Generator
  • XCD - 72X

Batch Systems for Passivation Processes

• With XRG-800 Standard Radical Generator
  • XED - 70X

• With XRG-900 High Rate Radical Generator
  • XED - 725

Copyright © 2002 Secon Semiconductor Equipment (M) Sdn. Bhd.
Last modified: Oktober 28, 2004